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[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - Nano-porous SIO2 electret with high surface potential and high thermal resistance
Suzuki, Masato, Wada, Takuya, Takahashi, Tomokazu, Nishida, Toshio, Yoshikawa, Yasuhiro, Aoyagi, SeijiYear:
2014
Language:
english
DOI:
10.1109/memsys.2014.6765665
File:
PDF, 1.17 MB
english, 2014