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[IEEE Conference Record of the Twenty-Fifth International Power Modulator Symposium and 2002 High-Voltage Workshop. International Power Modulator Conference - Hollywood, CA, USA (30 June-3 July 2002)] Conference Record of the Twenty-Fifth International Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop. - The Electra KRF laser
Hegeler, F., Myers, M.C., Friedman, M., Giuliani, J.L., Sethian, J.D., Swanekamp, S.B., Wolford, M.F.Year:
2002
Language:
english
DOI:
10.1109/modsym.2002.1189431
File:
PDF, 377 KB
english, 2002