[IEEE SEMI Advanced Semiconductor Manufacturing Conference and Workshop - Cambridge, MA, USA (13-15 Nov. 1995)] Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop - A model for intra industry, supplier, and SEMATECH collaboration including an inter-group effort by industry
Hossain, S.D., Pas, M.F., Cleavelin, R., Robinson, R., Miner, G., Nanda, A.Year:
1995
Language:
english
DOI:
10.1109/asmc.1995.484392
File:
PDF, 320 KB
english, 1995