Reconfigured-Wafer-to-Wafer 3-D Integration Using Parallel...

Reconfigured-Wafer-to-Wafer 3-D Integration Using Parallel Self-Assembly of Chips With Cu–SnAg Microbumps and a Nonconductive Film

Fukushima, Takafumi, Bea, Jichoel, Kino, Hisashi, Nagai, Chisato, Murugesan, Mariappan, Hashiguchi, Hideto, Lee, Kang-Wook, Tanaka, Tetsu, Koyanagi, Mitsumasa
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Volume:
61
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2013.2294831
Date:
February, 2014
File:
PDF, 3.36 MB
english, 2014
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