Study of Piezoelectrically Actuated Micropumps with Multiple Parallel Chambers
Guu, Y. H., Hocheng, H., Chang, C. H.Volume:
23
Language:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1080/10426910701796257
Date:
January, 2008
File:
PDF, 609 KB
english, 2008