[IEEE IEEE International Solid-State Sensors and Actuators...

  • Main
  • [IEEE IEEE International Solid-State...

[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers

Stahl, H., Hoechst, A., Fischer, F., Metzger, L., Reichenbach, R., Laermer, F., Kronmueller, S., Breitschwerdt, K., Gunn, R., Watcham, S., Rusu, C., Witvrouw, A.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
2
Year:
2003
Language:
english
DOI:
10.1109/sensor.2003.1217162
File:
PDF, 567 KB
english, 2003
Conversion to is in progress
Conversion to is failed