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[IEEE 2010 27th International Conference on Microelectronics Proceedings - Nis, Serbia (2010.05.16-2010.05.19)] 2010 27th International Conference on Microelectronics Proceedings - SPM electrical characterization of Ti/Al — Based ohmic contacts for sub-micron devices

Kolaklieva, L., Nesheva, D., Kakanakov, R., Bineva, I., Cimalla, V.
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Year:
2010
Language:
english
DOI:
10.1109/miel.2010.5490502
File:
PDF, 795 KB
english, 2010
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