![](/img/cover-not-exists.png)
[IEEE 2009 International Semiconductor Device Research Symposium (ISDRS 2009) - College Park, MD (2009.12.9-2009.12.11)] 2009 International Semiconductor Device Research Symposium - Reliability measurement of single axis capacitive accelerometers employing mechanical, thermal and acoustic stresses
Zaiyadi, N., Mohd-Yasin, F., Nagel, D.J., Korman, C.E.Year:
2009
Language:
english
DOI:
10.1109/isdrs.2009.5378027
File:
PDF, 244 KB
english, 2009