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[IEEE 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Clearwater, FL, USA (2009.08.17-2009.08.20)] 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Development of a micro displacement sensor with monolithic-integrated two-dimensionally distributed photodiodes
Inokuchi, M., Ando, H., Kinosita, M., Akase, K., Higurashi, Eiji, Sawada, R.Year:
2009
Language:
english
DOI:
10.1109/omems.2009.5338576
File:
PDF, 849 KB
english, 2009