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[IEEE 2006 Asia-Pacific Microwave Conference - Yokohama, Japan (2006.12.12-2006.12.15)] 2006 Asia-Pacific Microwave Conference - A new microwave-excited plasma source using an internal dielectric microwave applicator
Kohei Shimatani,, Yoshikazu Tsugami,, Ganachev, Ivan PYear:
2006
Language:
english
DOI:
10.1109/apmc.2006.4429783
File:
PDF, 213 KB
english, 2006