Diamond-Like Carbon (DLC) Liner: A New Stressor for...

IEEE Electron Device Letters 2008 / 07 Vol. 29; Iss. 7

Diamond-Like Carbon (DLC) Liner: A New Stressor for P-Channel Multiple-Gate Field-Effect Transistors

Tan, Kian-Ming, Fang, Wei-Wei, Yang, Mingchu, Liow, Tsung-Yang, Lee, Rinus T.-P., Balasubramanian, Narayanan, Yeo, Yee-Chia
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Volume:
29
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2008.923710
Date:
July, 2008
File:
PDF, 547 KB
english, 2008
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