[IEEE IEEE Sensors, 2005. - Irvine, CA, USA (Oct. 31,...

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[IEEE IEEE Sensors, 2005. - Irvine, CA, USA (Oct. 31, 2005)] IEEE Sensors, 2005. - Novel 3D Piezoresistive Silicon Force Sensor for Dimensional Metrology of Micro Components

Ruther, P., Bartholomeyczik, J., Trautmann, A., Wandt, M., Paul, O., Dominicus, W., Roth, R., Seitz, K., Strauss, W.
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Year:
2005
Language:
english
DOI:
10.1109/icsens.2005.1597872
File:
PDF, 1.06 MB
english, 2005
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