[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - The sensitivity of stiction performance to surface chemistry under various humidity regimes
Sammoura, Firas, Yang, KenYear:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969535
File:
PDF, 1.03 MB
english, 2011