[IEEE 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Clearwater, FL, USA (2009.08.17-2009.08.20)] 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - A novel white-light scanning interferometer for absolute nano-scale gap thickness measurement
Xu, Zhiguang, Shilpiekandula, Vijay, Youcef-toumi, Kamal, Yoon, Soon FattYear:
2009
Language:
english
DOI:
10.1109/omems.2009.5338544
File:
PDF, 300 KB
english, 2009