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[IEEE 2010 IEEE Ultrasonics Symposium (IUS) - San Diego, CA, USA (2010.10.11-2010.10.14)] 2010 IEEE International Ultrasonics Symposium - Quality control of ultrasonic bonding tools using a Scanning White Light Interferometer
Heikkinen, Ville, Kurppa, Risto, Seppanen, Henri, Raikkonen, Heikki, Aaltonen, Juha, Kassamakov, Ivan, Haggstrom, EdwardYear:
2010
Language:
english
DOI:
10.1109/ultsym.2010.5935926
File:
PDF, 1.90 MB
english, 2010