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[IEEE 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) - Singapore (2009.07.14-2009.07.17)] 2009 IEEE/ASME International Conference on Advanced Intelligent Mechatronics - Hybrid servo design for large area nano pattern stitching
Jia-Yush Yen,, Cheng-Hung Chen,, Lien-Sheng Chen,, Kuen-Yu Tsai,, Shuo-Hung Chang,Year:
2009
Language:
english
DOI:
10.1109/aim.2009.5229847
File:
PDF, 668 KB
english, 2009