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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - A flexible stress sensor using a sub-10μm silicon chip technology
Ferwana, S., Angelopoulos, E. A., Endler, S., Harendt, C., Burghartz, J. N.Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6627345
File:
PDF, 5.78 MB
english, 2013