Effect of sputtering condition on the surface properties of silicon oxide thin films prepared for liquid crystal alignment layers
Shi-Joon Sung, Eun Ae Jung, Dae-Hwan Kim, Jin-Kyu Kang, Kee-Jeong Yang, Yun Seon Do, Byeong-Dae ChoiVolume:
31
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.displa.2010.02.005
File:
PDF, 670 KB
english, 2010