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[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference - Shimane, Japan (31 Oct.-2 Nov. 2001)] Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) - Implantation of N-ion on sapphire substrate for GaN epilayer
Young Ju Park,, Yong Suk Cho,, Eui Kwan Koh,, Eun Kyu Kim,, Gyeungho Kim,, Dongjin Byun,, Suk-Ki Min,Year:
2001
Language:
english
DOI:
10.1109/imnc.2001.984170
File:
PDF, 182 KB
english, 2001