[IEEE 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Suzhou, Jiangsu, China (2009.07.6-2009.07.10)] 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Self-aligned SOI MOSFETs with Ω-shaped conductive layer and source/drain-tie
Jyi-Tsong Lin,, Tzu-Feng Chang,, Yi-Chuen Eng,, Hsuan-Hsu Chen,, Chih-Hao Kuo,, Chih-Hung Sun,, Po-Hiesh Lin,, Hsien-Nan Chiu,Year:
2009
Language:
english
DOI:
10.1109/ipfa.2009.5232558
File:
PDF, 9.30 MB
english, 2009