[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - Two-dimensional Arrangement of Vertically Oriented Cylindrical Domains of Diblock Copolymers using Graphoepitaxy with Artificial Guiding Pattern Layout
Yamaguchi, Toru, Edamoto, Masato, Warisawa, Shin'ichi, Ishihara, Sunao, Yamaguchi, HiroshiYear:
2007
Language:
english
DOI:
10.1109/imnc.2007.4456290
File:
PDF, 1.04 MB
english, 2007