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[IEEE 2010 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2010) - Xiamen (2010.01.20-2010.01.23)] 2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems - Hybrid etching process and its application in thermopile infrared sensor
Dehui Xu,, Bin Xiong,, Yuelin Wang,, Yinglei Ma,Year:
2010
Language:
english
DOI:
10.1109/nems.2010.5592424
File:
PDF, 664 KB
english, 2010