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[IEEE 2012 7th International Forum on Strategic Technology (IFOST) - Tomsk, Russia (2012.09.18-2012.09.21)] 2012 7th International Forum on Strategic Technology (IFOST) - High-frequency short-pulsed metal plasma-immersion ion implantation using filtered DC vacuum-arc plasma (part one)
Ryabchikov, A. I., Stepanov, I. B., Sivin, D. O., Dektyarev, S. V., Dodorin, K. Yu.Year:
2012
Language:
english
DOI:
10.1109/ifost.2012.6357800
File:
PDF, 292 KB
english, 2012