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[IEEE 33rd European Microwave Conference, 2003 - Munich, Germany (2003.10.4-2003.10.6)] 33rd European Microwave Conference, 2003 - Ka-Band MEMS Switches on CMOS Grade Silicon with a Polyimide Interface Layer
Ponchak, George E., Varaljay, Nicholas C., Papapolymerou, JohnYear:
2003
Language:
english
DOI:
10.1109/euma.2003.341125
File:
PDF, 353 KB
english, 2003