One-Megapixel Monocrystalline-Silicon Micromirror Array on CMOS Driving Electronics Manufactured With Very Large-Scale Heterogeneous Integration
Zimmer, Fabian, Lapisa, Martin, Bakke, Thor, Bring, Martin, Stemme, Göran, Niklaus, FrankVolume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2127454
Date:
June, 2011
File:
PDF, 1.09 MB
english, 2011