LOW TEMPERATURE DEPOSITION OF Pb(Zr,Ti)O 3...

Integrated Ferroelectrics 2006 / 11 Vol. 81; Iss. 1

LOW TEMPERATURE DEPOSITION OF Pb(Zr,Ti)O 3 THIN FILMS BY LIQUID DELIVERY MOCVD USING A COCKTAIL SOURCE WITH Pb(DMAMP) 2 , Zr(MMP) 4 AND Ti(MMP) 4

OTANI, YOHEI, UCHIYAMA, KIYOSHI, OKAMURA, SOICHIRO, SHIOSAKI, TADASHI
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Volume:
81
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580600663326
Date:
November, 2006
File:
PDF, 904 KB
english, 2006
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