![](/img/cover-not-exists.png)
[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Creep of parylene-C film
Lin, Jeffrey Chun-Hui, Deng, Peigang, Lam, Gilbert, Lu, Bo, Lee, Yi-Kuen, Tai, Yu-ChongYear:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969483
File:
PDF, 726 KB
english, 2011