[IEEE 2007 IEEE International Conference on Control and Automation - Guangzhou (2007.05.30-2007.06.1)] 2007 IEEE International Conference on Control and Automation - Queueing Generalized Stochastic Colored Timed Petri Nets-based Approach to Modeling for Semiconductor Wafer Fabrication
Zheng-Cai Cao,, Fei Qiao,, Qi-Di Wu,Year:
2007
Language:
english
DOI:
10.1109/icca.2007.4376879
File:
PDF, 1.32 MB
english, 2007