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[IEEE 14th International Vacuum Microelectronics Conference - Davis, CA, USA (12-16 Aug. 2001)] IVMC 2001. Proceedings of the 14th International Vacuum Microelectronics Conference (Cat. No.01TH8586) - Characteristics of phosphorus implanted MPCVD diamond films
Jong Duk Lee,, Euo Sik Cho,, Byung-Gook Park,, Sang Jik Kwon,Year:
2001
Language:
english
DOI:
10.1109/ivmc.2001.939763
File:
PDF, 158 KB
english, 2001