[IEEE 2009 IEEE Sensors - Christchurch, New Zealand (2009.10.25-2009.10.28)] 2009 IEEE Sensors - Fabrication of SOI MEMS inertial sensors with dry releasing process
Mao, Xu, Wei, Yumin, Yang, Zhenchuan, Yan, GuizhenYear:
2009
Language:
english
DOI:
10.1109/icsens.2009.5398278
File:
PDF, 1.47 MB
english, 2009