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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Quality factor enhancement in lamb wave resonators utilizing AlN plates with convex edges
Lin, Chih-Ming, Lai, Yun-Ju, Yen, Ting-Ta, Hsu, Jin-Chen, Chen, Yung-Yu, Senesky, Debbie G., Pisano, Albert P.Year:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969687
File:
PDF, 1.33 MB
english, 2011