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[IEEE 2005 IEEE International Conference on Mechatronics - Taipei, Taiwan (10-12 July 2005)] IEEE International Conference on Mechatronics, 2005. ICM '05. - Optimization of the plasma sputtering deposition processing by computational fluid dynamics

Sung-Wei Yang,, Thomas Chung-Kuang Yang,, Chien-Lung Hung,, Chun-Kuei Fu,, Jui-Ming Hua,, Jenny Hao-Hsin Hung,
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Year:
2005
Language:
english
DOI:
10.1109/icmech.2005.1529356
File:
PDF, 615 KB
english, 2005
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