Role of Ambient Composition on the Formation and Shape of...

ECS Journal of Solid State Science and Technology 2014 / 01 Vol. 3; Iss. 1

Role of Ambient Composition on the Formation and Shape of Watermarks on a Bare Silicon Substrate

Tamaddon, A. H., Mertens, P. W., Vermant, J., Vereecke, G., Holsteyns, F., Heyns, M., De Gendt, S.
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Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.014401jss
Date:
January, 2014
File:
PDF, 751 KB
english, 2014
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