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[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - Precise release and insulation technology for vertical hall sensors and trench-defined MEMS
Sunier, R., Monajemi, P., Ayazi, F., Vancura, T., Baltes, H., Brand, O.Year:
2004
Language:
english
DOI:
10.1109/icsens.2004.1426457
File:
PDF, 990 KB
english, 2004