Plasma Bubble in an RF Reactor

Plasma Bubble in an RF Reactor

Sigeneger, F., Basner, R., Loffhagen, D., Kersten, H.
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Volume:
36
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2008.920898
Date:
August, 2008
File:
PDF, 523 KB
english, 2008
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