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[IEEE 2009 IEEE International Reliability Physics Symposium (IRPS) - Montreal, QC, Canada (2009.04.26-2009.04.30)] 2009 IEEE International Reliability Physics Symposium - Unique electrical characterization and in-line monitoring of nano-tipped defects in metal-insulator-metal capacitors
Lieyi Sheng,, Snyder, Eric, Doub, Jason, Berti, Valerie, Kriner, Levi, Glines, EddieYear:
2009
Language:
english
DOI:
10.1109/irps.2009.5173355
File:
PDF, 1.47 MB
english, 2009