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[IEEE 2007 Proceedings 57th Electronic Components and Technology Conference - Sparks, NV, USA (2007.05.29-2007.06.1)] 2007 Proceedings 57th Electronic Components and Technology Conference - Pattern Density Methodology Using IBM Foundry Technologies
Scagnelli, David, Grant, Casey, Carrig, Keith, Kemerer, Tim, Landis, Howard, McDevitt, Tom, Sucharitaves, Jeanne-tania, Tsai, Esther, Kumar, Mukesh, Pastel, PaulYear:
2007
Language:
english
DOI:
10.1109/ectc.2007.373963
File:
PDF, 2.96 MB
english, 2007