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[IEEE International Conference on Plasma Sciences (ICOPS) - Vancouver, BC, Canada (1993.06.7-1993.06.9)] International Conference on Plasma Sciences (ICOPS) - Monte Carlo simulation of electron behavior in an electron cyclotron resonance microwave discharge
Kuo, S.C., Kunhardt, E.E., Kuo, S.P.Year:
1993
Language:
english
DOI:
10.1109/plasma.1993.593406
File:
PDF, 119 KB
english, 1993