![](/img/cover-not-exists.png)
[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - Micro pressure sensor fabrication without problem of stiction for a wider range of measurement
Liu, C.W., Ko, H.S., Chie Gau,, Liu, C.G.Year:
2004
Language:
english
DOI:
10.1109/icsens.2004.1426305
File:
PDF, 355 KB
english, 2004