[IEEE LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - Newport, RI, USA (21-24 April 1992)] LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - Analysis of damage during InP hydrocarbon-RIE
Morito, K., Matsuda, M., Ishikawa, H., Wada, O.Year:
1992
DOI:
10.1109/iciprm.1992.235573
File:
PDF, 210 KB
1992