[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A Single-Wafer-Processed XY-Stage Fabricated with Trench-sidewall Doping and Refilled-Trench Isolating Technology

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