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[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A Single-Wafer-Processed XY-Stage Fabricated with Trench-sidewall Doping and Refilled-Trench Isolating Technology
Gu, Lei, Li, Xinxin, Bao, Haifei, Liu, Bin, Wang, Yuelin, Liu, Min, Yang, Zunxian, Cheng, BaoluoYear:
2006
Language:
english
DOI:
10.1109/nems.2006.334912
File:
PDF, 4.09 MB
english, 2006