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[IEEE Technical Digest., International Electron Devices Meeting - San Francisco, CA, USA (11-14 Dec. 1988)] Technical Digest., International Electron Devices Meeting - Improvements of trench capacitor characteristics by pre-oxidation surface cleaning with HNO/sub 3/-HF-H/sub 2/O solution
Ohsawa, A., Takizawa, R., Honda, K., Matsutani, T., Imaoka, K.Year:
1988
DOI:
10.1109/iedm.1988.32915
File:
PDF, 194 KB
1988