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[IEEE ICVC'99. 6th International Conference on VLSI and CAD - Seoul, South Korea (26-27 Oct. 1999)] ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) - Ultra thin-oxide damage from gate charging during PETEOS deposition processing
Young-Gwan Kim,, Hazoong Kim,, Kang-Sik Youn,, Dae-Gwan Kang,, Jeong-Mo Hwang,Year:
1999
Language:
english
DOI:
10.1109/icvc.1999.820894
File:
PDF, 231 KB
english, 1999