[Japan Soc. Appl. Phys 2001 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (12-14 June 2001)] 2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.01 CH37184) - Fabrication of a novel vertical pMOSFET with enhanced drive current and reduced short-channel effects and floating body effects
Qiqing Ouyang,, Xiangdong Chen,, Tasch, A.F., Register, L.F., Banerjee, S.K., Chu, J.O., Ott, J.A.Year:
2001
Language:
english
DOI:
10.1109/vlsit.2001.934943
File:
PDF, 269 KB
english, 2001