[IEEE 2010 IEEE 37th International Conference on Plasma Sciences (ICOPS) - Norfolk, VA, USA (2010.06.20-2010.06.24)] 2010 Abstracts IEEE International Conference on Plasma Science - Numerical simulation of a magnetron plasma sputtering system using VORPAL
Zhou, Chuandong, Stoltz, Peter H.Year:
2010
Language:
english
DOI:
10.1109/plasma.2010.5534033
File:
PDF, 172 KB
english, 2010