[IEEE 14th International Vacuum Microelectronics Conference...

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[IEEE 14th International Vacuum Microelectronics Conference - Davis, CA, USA (12-16 Aug. 2001)] IVMC 2001. Proceedings of the 14th International Vacuum Microelectronics Conference (Cat. No.01TH8586) - The utmost abilities of alumina technology on formation of miniature active and passive elements of VICs [vacuum microelectronics]

Mukhurov, N.I., Galdetskiy, A.V., Gasenkova, I.V., Kotova, I.F., Ryzhikov, I.A.
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Year:
2001
Language:
english
DOI:
10.1109/ivmc.2001.939708
File:
PDF, 181 KB
english, 2001
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