![](/img/cover-not-exists.png)
[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Effect of phonon interactions on limiting the f.Q product of micromechanical resonators
Tabrizian, R., Rais-Zadeh, M., Ayazi, F.Year:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285627
File:
PDF, 400 KB
english, 2009