Processing and performance of integrated ferroelectric and...

Processing and performance of integrated ferroelectric and CMOS test structures for memory applications

Dormans, G. J. M., Larsen, P. K., Spierings, G. A.C.M., Dikken, J., Ulenaers, M. J. E., Cuppens, R., Taylor, D. J., Verhaar, R. D. J.
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Volume:
6
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589508019356
Date:
January, 1995
File:
PDF, 1.14 MB
english, 1995
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