[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - CMOS based optical focusing stage with phase grating Fresnel lens
Lee, Sz-Yuan, Wang, Chia-Hsi, Yang, Chih-Hsiang, Sun, Chih-Ming, Fang, WeileunYear:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285642
File:
PDF, 909 KB
english, 2009