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[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - Fabrication and design of a heat transfer micro channel system at low temperature process by MEMS technique
Liu, C.W., Chie Gau,, Yang, C.S., Dai, B.T.Year:
2004
Language:
english
DOI:
10.1109/icsens.2004.1426243
File:
PDF, 373 KB
english, 2004